Invention Grant
- Patent Title: Liquid ejecting head, liquid ejecting apparatus, and actuator
-
Application No.: US18342240Application Date: 2023-06-27
-
Publication No.: US12023929B2Publication Date: 2024-07-02
- Inventor: Harunobu Koike , Tatsuo Sawasaki , Masao Nakayama , Chihiro Nishi , Toshihiro Shimizu , Yasushi Yamazaki
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: WORKMAN NYDEGGER
- Priority: JP 20163341 2020.09.29
- The original application number of the division: US17448913 2021.09.27
- Main IPC: B41J2/14
- IPC: B41J2/14

Abstract:
A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO2 and a second layer that contains ZrO2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.
Public/Granted literature
- US20230339229A1 LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR Public/Granted day:2023-10-26
Information query
IPC分类: