Invention Grant
- Patent Title: Display panel metal mask improvced quality standard detection and inspecting method thereof
-
Application No.: US17523947Application Date: 2021-11-11
-
Publication No.: US11980043B2Publication Date: 2024-05-07
- Inventor: Yun-Pei Yang , Mei-Lun Li , Wen-Yi Lin
- Applicant: Darwin Precisions Corporation
- Applicant Address: TW Hsinchu County
- Assignee: DARWIN PRECISIONS CORPORATION
- Current Assignee: DARWIN PRECISIONS CORPORATION
- Current Assignee Address: TW Hsinchu County
- Agency: WPAT, P.C
- Priority: TW 0112006 2021.03.31
- Main IPC: H10K50/00
- IPC: H10K50/00 ; C23C14/04 ; H10K71/16

Abstract:
A metal mask and an inspecting method thereof are provided for improving quality standard detection. The metal mask has a first and a second long side and plural pattern regions. The method includes the followings steps Based on the pattern regions adjacent to the first and second long sides, a first and a second reference straight line adjacent to the first and second long sides respectively are defined. Then, a first maximum offset length between the pattern regions and the first reference straight line is measured. A second maximum offset length between the pattern regions and the second reference straight line is measured. When a difference between the first and second maximum offset lengths is less than or equal to 20 μm, the metal mask is determined to meet an inspecting standard.
Public/Granted literature
- US20220320438A1 METAL MASK AND INSPECTING METHOD THEREOF Public/Granted day:2022-10-06
Information query