Invention Grant
- Patent Title: SONOS memory and method for making the same
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Application No.: US17352451Application Date: 2021-06-21
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Publication No.: US11980032B2Publication Date: 2024-05-07
- Inventor: Xiaoliang Tang , Naoki Tsuji , Haoyu Chen , Hua Shao
- Applicant: Shanghai Huali Microelectronics Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee Address: CN Shanghai
- Agency: Banner & Witcoff, Ltd.
- Priority: CN 2010698851.3 2020.07.20
- Main IPC: H10B43/35
- IPC: H10B43/35

Abstract:
The present application discloses a method for manufacturing a SONOS memory, including: providing a substrate, wherein a first transistor gate of the SONOS memory and a first layer used for forming a second transistor gate are formed on the substrate; forming a patterned second layer on the upper surface of the first layer, wherein the second layer exposes the first layer corresponding to the outer side of the second transistor gate; performing first etching on the first layer exposed by the second layer; removing the second layer; and performing second etching on the first layer to form the second transistor gate. The present application also discloses a SONOS memory. The present application can form a vertical structure outside a selective transistor and a storage transistor, thus forming a vertical side wall in the subsequent process, so as to improve the performance of the device.
Public/Granted literature
- US20220020755A1 SONOS Memory and Method for Making the Same Public/Granted day:2022-01-20
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