Invention Grant
- Patent Title: Display device including transistor and manufacturing method thereof
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Application No.: US18129975Application Date: 2023-04-03
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Publication No.: US11978741B2Publication Date: 2024-05-07
- Inventor: Junichiro Sakata , Toshinari Sasaki , Miyuki Hosoba
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP 09159052 2009.07.03
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/02 ; H01L29/24 ; H01L29/66 ; H01L29/786

Abstract:
An object is to provide a display device which operates stably with use of a transistor having stable electric characteristics. In manufacture of a display device using transistors in which an oxide semiconductor layer is used for a channel formation region, a gate electrode is further provided over at least a transistor which is applied to a driver circuit. In manufacture of a transistor in which an oxide semiconductor layer is used for a channel formation region, the oxide semiconductor layer is subjected to heat treatment so as to be dehydrated or dehydrogenated; thus, impurities such as moisture existing in an interface between the oxide semiconductor layer and the gate insulating layer provided below and in contact with the oxide semiconductor layer and an interface between the oxide semiconductor layer and a protective insulating layer provided on and in contact with the oxide semiconductor layer can be reduced.
Public/Granted literature
- US20230238387A1 DISPLAY DEVICE INCLUDING TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2023-07-27
Information query
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