Invention Grant
- Patent Title: Composition containing a dicyanostyryl group, for forming a resist underlayer film capable of being wet etched
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Application No.: US17619433Application Date: 2020-06-17
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Publication No.: US11977331B2Publication Date: 2024-05-07
- Inventor: Takafumi Endo , Yuki Endo
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 19111916 2019.06.17
- International Application: PCT/JP2020/023671 2020.06.17
- International Announcement: WO2020/255985A 2020.12.24
- Date entered country: 2021-12-15
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/004 ; G03F7/42 ; H01L21/027 ; H01L21/308

Abstract:
A resist underlayer film that exhibits removability and preferably solubility only in wet etching reagent solutions, while exhibiting good resistance to resist developers that are resist solvents or aqueous alkali solutions. The composition for forming a resist underlayer film includes a dicyanostyryl group-bearing polymer (P) or dicyanostyryl group-bearing compound (C) and includes solvent, and does not contain a protonic acid curing catalyst and does not contain an alkylated aminoplast crosslinking agent derived from melamine, urea, benzoguanamine, or glycoluril.
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Information query
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