Invention Grant
- Patent Title: Film bulk acoustic resonator package with thin film sealing structure and manufacturing method therefor
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Application No.: US17202802Application Date: 2021-03-16
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Publication No.: US11949401B2Publication Date: 2024-04-02
- Inventor: Jin Nyoung Jang , Ivoyl P Koutsaroff
- Applicant: WISOL CO., LTD.
- Applicant Address: KR Osan-si
- Assignee: WISOL CO., LTD.
- Current Assignee: WISOL CO., LTD.
- Current Assignee Address: KR Osan-si
- Agency: LRK PATENT LAW FIRM
- Priority: KR 20200095230 2020.07.30
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H3/02 ; H03H9/05 ; H03H9/10

Abstract:
A method for manufacturing a film bulk acoustic resonator (FBAR) package with a thin film sealing structure includes: forming an FBAR having a bottom electrode, a piezoelectric layer, and a top electrode on a substrate; forming a plurality of inner pad electrodes electrically connected to the top electrode and the bottom electrode of the FBAR; attaching a PR (photo-resist) film to tops of the inner pad electrodes; etching the PR film to expose the inner pad electrodes to the outside; and forming a sealing layer on top of the PR film and tops of the exposed inner pad electrodes.
Public/Granted literature
- US20220038072A1 FILM BULK ACOUSTIC RESONATOR PACKAGE WITH THIN FILM SEALING STRUCTURE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2022-02-03
Information query
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