Invention Grant
- Patent Title: In-situ cap for germanium photodetector
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Application No.: US17197353Application Date: 2021-03-10
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Publication No.: US11949030B2Publication Date: 2024-04-02
- Inventor: Chen-Hao Chiang , Eugene I-Chun Chen , Chih-Ming Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L31/028
- IPC: H01L31/028 ; H01L31/0203 ; H01L31/103 ; H01L31/105 ; H01L31/18

Abstract:
Various embodiments of the present disclosure are directed towards an image sensor with a passivation layer for dark current reduction. A device layer overlies a substrate. Further, a cap layer overlies the device layer. The cap and device layers and the substrate are semiconductor materials, and the device layer has a smaller bandgap than the cap layer and the substrate. For example, the cap layer and the substrate may be silicon, whereas the device layer may be or comprise germanium. A photodetector is in the device and cap layers, and the passivation layer overlies the cap layer. The passivation layer comprises a high k dielectric material and induces formation of a dipole moment along a top surface of the cap layer.
Public/Granted literature
- US20220131017A1 IN-SITU CAP FOR GERMANIUM PHOTODETECTOR Public/Granted day:2022-04-28
Information query
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