Invention Grant
- Patent Title: Image sensor having vertical, transfer, reset, source follower, and select transistors vertically aligned over the photodiode
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Application No.: US16904708Application Date: 2020-06-18
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Publication No.: US11948964B2Publication Date: 2024-04-02
- Inventor: Kangmook Lim , Sungin Kim , Changhwa Kim , Yeoseon Choi
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Fish & Richardson P.C.
- Priority: KR 20200013689 2020.02.05
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor is disclosed. The image sensor includes a semiconductor substrate, a plurality of pillars protruding from the semiconductor substrate, and spaced from each other, a spacer layer on the semiconductor substrate and a sidewall of each of the plurality of pillars, a plurality of gate structures on the spacer layer, and a plurality of unit pixels arranged in a matrix form. The first unit pixel includes a first photodiode (PD) formed in the semiconductor substrate, a first pillar, a second pillar and a third pillar of the plurality of pillars, and a first gate structure and a second gate structure of the plurality of gate structures. Each of the first pillar and the second pillar includes a first channel region and a first drain region on the first channel region. The third pillar is not surround by any gate structure of the plurality of gate structures.
Public/Granted literature
- US20210242270A1 IMAGE SENSOR INCLUDING TRANSISTOR INCLUDING PROTRUDING CHANNEL ELECTRODE Public/Granted day:2021-08-05
Information query
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