Invention Grant
- Patent Title: Profile control of gate structures in semiconductor devices
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Application No.: US17320171Application Date: 2021-05-13
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Publication No.: US11948939B2Publication Date: 2024-04-02
- Inventor: Kai-Chi Wu , Ching-Hung Kao , Meng-I Kang , Kuo-Fang Ting
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/66 ; H01L29/78

Abstract:
An integrated circuit (IC) with active and dummy device cell arrays and a method of fabricating the same are discloses. The IC includes a substrate, an active device cell, and a dummy device cell. The active device cell includes an array of source/drain (S/D) regions of a first conductivity type disposed on or within the substrate and an array of gate structures with a first gate fill material disposed on the substrate. The dummy device cell includes a first array of S/D regions of the first conductivity type disposed on or within the substrate, a second array of S/D regions of a second conductivity type disposed on or within the substrate, and an array of dual gate structures disposed on the substrate. Each of the dual gate structures includes the first gate fill material and a second gate fill material that is different from the first gate fill material.
Public/Granted literature
- US20220223589A1 PROFILE CONTROL OF GATE STRUCTURES IN SEMICONDUCTOR DEVICES Public/Granted day:2022-07-14
Information query
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