Invention Grant
- Patent Title: Robot for simultaneous substrate transfer
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Application No.: US17965491Application Date: 2022-10-13
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Publication No.: US11948817B2Publication Date: 2024-04-02
- Inventor: Charles T. Carlson , Jason M. Schaller , Luke Bonecutter , David Blahnik
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B65G47/90 ; H01L21/68 ; H01L21/687

Abstract:
Exemplary substrate processing systems may include a transfer region housing defining an internal volume. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft concentric with and counter-rotatable to the first shaft. The transfer apparatus may include a first end effector coupled with the first shaft. The first end effector may include a plurality of first arms. The transfer apparatus may also include a second end effector coupled with the second shaft. The second end effector may include a plurality of second arms having a number of second arms equal to the number of first arms of the first end effector.
Public/Granted literature
- US20230032854A1 ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER Public/Granted day:2023-02-02
Information query
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