Invention Grant
- Patent Title: Combined RF generator and RF solid-state matching network
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Application No.: US17979180Application Date: 2022-11-02
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Publication No.: US11948775B2Publication Date: 2024-04-02
- Inventor: Imran Ahmed Bhutta
- Applicant: ASM America, Inc.
- Applicant Address: US AZ Phoenix
- Assignee: ASM America, Inc.
- Current Assignee: ASM America, Inc.
- Current Assignee Address: US AZ Phoenix
- Agency: The Belles Group, P.C. (ASM)
- Main IPC: H03H7/40
- IPC: H03H7/40 ; H01J37/32 ; H01L21/02 ; H01L21/285 ; H01L21/311 ; H01L21/3213 ; H01L21/67 ; H03H7/38
Abstract:
In one embodiment, a method of matching an impedance is disclosed. An impedance matching network is coupled between a radio frequency (RF) source and a plasma chamber. The matching network includes a variable reactance element (VRE) having different positions for providing different reactances. The RF source is subject to a power control scheme to control a power delivered to the matching network. Based on a determined parameter, a new position for the VRE is determined to reduce a reflected power at the RF input of the matching network. The VRE is altered to the new position while the power control scheme is altered.
Public/Granted literature
- US20230082359A1 COMBINED RF GENERATOR AND RF SOLID-STATE MATCHING NETWORK Public/Granted day:2023-03-16
Information query
