Invention Grant
- Patent Title: Transfer hand and substrate processing apparatus with conductive ring and tilting vacuum pad
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Application No.: US17513002Application Date: 2021-10-28
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Publication No.: US11935779B2Publication Date: 2024-03-19
- Inventor: Tae Hoon Lee , Ju Won Kim , Jin Sung Sun , Bo Hee Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR 20200143571 2020.10.30
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/683 ; H01L21/687
Abstract:
Various example embodiments provide a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuum assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.
Public/Granted literature
- US20220139756A1 TRANSFER HAND AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2022-05-05
Information query
IPC分类:
