Invention Grant
- Patent Title: Wafer level package and method of manufacture
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Application No.: US15734202Application Date: 2019-04-16
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Publication No.: US11929729B2Publication Date: 2024-03-12
- Inventor: Markus Schieber
- Applicant: RF360 SINGAPORE PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: RF360 Singapore Pte. Ltd.
- Current Assignee: RF360 Singapore Pte. Ltd.
- Current Assignee Address: SG Republic Plaza
- Agency: Patterson + Sheridan LLP
- Priority: DE 2018113218.2 2018.06.04
- International Application: PCT/EP2019/059777 2019.04.16
- International Announcement: WO2019/233667A 2019.12.12
- Date entered country: 2020-12-01
- Main IPC: H03H9/10
- IPC: H03H9/10 ; H03H3/02 ; H03H3/08 ; H03H9/02 ; H10N30/02 ; H10N30/06 ; H10N30/87 ; H10N30/88

Abstract:
A wafer level package comprises a functional wafer with a first surface, device structures connected to device pads arranged on the first surface. A cap wafer, having an inner and an outer surface, is bonded with the inner surface to the first surface of the functional wafer. A frame structure surrounding the device structures is arranged between functional wafer and cap wafer. Connection posts are connecting the device pads on the first surface to inner cap pads on the inner surface. Electrically conducting vias are guided through the cap wafer connecting inner cap pads on the inner surface and package pads on the outer surface of the cap wafer.
Public/Granted literature
- US20210226605A1 WAFER LEVEL PACKAGE AND METHOD OF MANUFACTURE Public/Granted day:2021-07-22
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