Invention Grant
- Patent Title: Superjunction transistor device
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Application No.: US17513344Application Date: 2021-10-28
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Publication No.: US11929395B2Publication Date: 2024-03-12
- Inventor: Hans Weber , Ingo Muri , Maximilian Treiber , Daniel Tutuc
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE 2018132435.9 2018.12.17
- The original application number of the division: US16715816 2019.12.16
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/265 ; H01L29/66 ; H01L29/78

Abstract:
A method and a transistor device are disclosed. The transistor device includes: a semiconductor body; first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of the semiconductor body; transistor cells in the inner region of the semiconductor body, each transistor cell including a body region and a source region, the transistor cells including a common drain region; and a buffer region arranged between the drain region and the first and second regions. A dopant dose in the first and second regions decreases towards an edge surface of the semiconductor body. A dopant dose in the buffer region decreases towards the edge surface.
Information query
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