Invention Grant
- Patent Title: Shielding mechanism and thin-film-deposition equipment using the same
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Application No.: US17525403Application Date: 2021-11-12
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Publication No.: US11929242B2Publication Date: 2024-03-12
- Inventor: Jing-Cheng Lin
- Applicant: SKY TECH INC.
- Applicant Address: TW Hsinchu County
- Assignee: SKY TECH INC.
- Current Assignee: SKY TECH INC.
- Current Assignee Address: TW Hsinchu County
- Agency: HDLS IPR SERVICES
- Agent Chun-Ming Shih
- Priority: TW 0123823 2021.06.29
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/54 ; H01J37/32 ; C23C16/44

Abstract:
The present disclosure provides a shielding mechanism and a thin-film-deposition equipment using the same, wherein the shielding mechanism includes two shield members and a driver. The driver includes a motor and a shaft seal. The motor interconnects the two shield members via the shaft seal, and such that to drive the two shield members to sway in opposite directions and to switch between an open state and a shielding state. Furthermore, each of the two shield members is formed with at least one cavity, for reducing weights thereof and loading of the motor and the driver.
Public/Granted literature
- US20220415633A1 SHIELDING MECHANISM AND THIN-FILM-DEPOSITION EQUIPMENT USING THE SAME Public/Granted day:2022-12-29
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