Invention Grant
- Patent Title: Wafer detection method, device, apparatus, and storage medium
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Application No.: US17401595Application Date: 2021-08-13
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Publication No.: US11928808B2Publication Date: 2024-03-12
- Inventor: Deqing Qu
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN 2110022536.3 2021.01.08
- Main IPC: G06T7/11
- IPC: G06T7/11 ; G01N21/95 ; G06T7/00

Abstract:
The disclosure provides a wafer detection method, device, apparatus, and a storage medium. The method includes: an original wafer picture to be detected is received; picture segmentation is performed on the original wafer picture to acquire a plurality of first pictures; picture zooming is performed on the original wafer picture and the first pictures to respectively acquire a second picture and a plurality of third pictures, the second picture and the third pictures meet an input size requirement of the wafer detection model to an input picture; the second picture and the third pictures are sequentially input into a wafer detection model to acquire a first detection result corresponding to the second picture and a second detection result corresponding to each third picture; and a total detection result of the original wafer picture is determined according to the first detection result and the second detection results.
Public/Granted literature
- US20220222810A1 WAFER DETECTION METHOD, DEVICE, APPARATUS, AND STORAGE MEDIUM Public/Granted day:2022-07-14
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