Invention Grant
- Patent Title: Low leakage current germanium-on-silicon photo-devices
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Application No.: US17429500Application Date: 2019-05-04
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Publication No.: US11894480B2Publication Date: 2024-02-06
- Inventor: Eran Katzir , Vincent Immer , Omer Kapach , Avraham Bakal , Uriel Levy
- Applicant: TriEye Ltd.
- Applicant Address: IL Tel Aviv
- Assignee: TriEye Ltd.
- Current Assignee: TriEye Ltd.
- Current Assignee Address: IL Tel Aviv
- Agency: Nathan & Associates
- Agent Menachem Nathan
- International Application: PCT/IB2019/053661 2019.05.04
- International Announcement: WO2020/225588A 2020.11.12
- Date entered country: 2021-08-09
- Main IPC: H01L31/109
- IPC: H01L31/109 ; H01L31/0312 ; H01L31/18 ; H01L31/028 ; H01L31/103

Abstract:
Germanium (Ge)-Silicon (Si) structures, optoelectronic devices and method for forming same. A structure comprises a Si substrate, a Ge seed layer and a Ge epitaxial layer separated by respective interfaces that share a common plane normal, wherein the Si substrate and the Ge seed layer have a same first doping type with a first doping level, and a locally doped region formed in the Si layer adjacent to the Ge seed layer and having a second doping type with a second doping level, wherein the locally doped region is designed to reduce leakage currents between the Si substrate and the Ge epitaxial layer when an electrical bias is applied to the structure.
Public/Granted literature
- US20220131024A1 LOW LEAKAGE CURRENT GERMANIUM-ON-SILICON PHOTO-DEVICES Public/Granted day:2022-04-28
Information query
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