Invention Grant
- Patent Title: Image sensor device and methods of forming the same
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Application No.: US18070239Application Date: 2022-11-28
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Publication No.: US11894411B2Publication Date: 2024-02-06
- Inventor: Yeh-Hsun Fang , Chiao-Chi Wang , Chung-Chuan Tseng , Chia-Ping Lai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: FOLEY & LARDNER LLP
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L27/146

Abstract:
A method includes forming a plurality of openings extending into a substrate from a front surface of the substrate. The substrate includes a first semiconductor material. Each of the plurality of openings has a curve-based bottom surface. The method includes filling the plurality of openings with a second semiconductor material. The second semiconductor material is different from the first semiconductor material. The method includes forming a plurality of pixels that are configured to sense light in the plurality of openings, respectively, using the second semiconductor material.
Public/Granted literature
- US20230093001A1 IMAGE SENSOR DEVICE AND METHODS OF FORMING THE SAME Public/Granted day:2023-03-23
Information query
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