Invention Grant
- Patent Title: Vibrator device
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Application No.: US17185174Application Date: 2021-02-25
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Publication No.: US11863157B2Publication Date: 2024-01-02
- Inventor: Junichi Takeuchi , Hisahiro Ito
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP 20033743 2020.02.28
- Main IPC: H03H9/05
- IPC: H03H9/05 ; H03B5/32 ; H03H9/19 ; H03H9/10

Abstract:
There is provided a vibrator device including: a vibrator element; a semiconductor substrate having a first surface on which the vibrator element is disposed and a second surface positioned on an opposite side of the first surface; a fractional N-PLL circuit disposed at the second surface; a wiring that is disposed at the first surface and electrically couples the vibrator element and the fractional N-PLL circuit; and an output terminal that is disposed at the second surface side of the semiconductor substrate, is electrically coupled to the fractional N-PLL circuit, and outputs a signal from the fractional N-PLL circuit, in which the output terminal does not overlap the wiring in a plan view along a thickness direction of the semiconductor substrate.
Public/Granted literature
- US20210273628A1 VIBRATOR DEVICE Public/Granted day:2021-09-02
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