Invention Grant
- Patent Title: Semiconductor device structure including forksheet transistors and methods of forming the same
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Application No.: US17207573Application Date: 2021-03-19
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Publication No.: US11862700B2Publication Date: 2024-01-02
- Inventor: Jia-Ni Yu , Kuo-Cheng Chiang , Mao-Lin Huang , Lung-Kun Chu , Chung-Wei Hsu , Chun-Fu Lu , Chih-Hao Wang , Kuan-Lun Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: NZ Carr Law Office
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8238 ; H01L27/092 ; H01L29/66

Abstract:
A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a first dielectric feature extending along a first direction, the first dielectric feature comprising a first dielectric layer having a first sidewall and a second sidewall opposing the first sidewall, a first semiconductor layer disposed adjacent the first sidewall, the first semiconductor layer extending along a second direction perpendicular to the first direction, a second dielectric feature extending along the first direction, the second dielectric feature disposed adjacent the first semiconductor layer, and a first gate electrode layer surrounding at least three surfaces of the first semiconductor layer, and a portion of the first gate electrode layer is exposed to a first air gap.
Public/Granted literature
- US20220302275A1 SEMICONDUCTOR DEVICE STRUCTURE INCLUDING FORKSHEET TRANSISTORS AND METHODS OF FORMING THE SAME Public/Granted day:2022-09-22
Information query
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