Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US17120951Application Date: 2020-12-14
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Publication No.: US11862696B2Publication Date: 2024-01-02
- Inventor: Shunsuke Okada , Tomonori Aoyama , Tatsunori Isogai , Masaki Noguchi
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 20047862 2020.03.18
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/28 ; H01L29/51 ; H10B43/27

Abstract:
A semiconductor storage device relating to one embodiment includes: a stacked body in which electrode films and insulating films are alternately stacked in a first direction; a first and a second charge storage films that are arranged away from each other in the first direction inside the stacked body and each face one of the electrode films; and a tunnel insulating film that extends in the first direction inside the stacked body and is in contact with the first and the second charge storage films. The first and the second charge storage films each include a first film that is in contact with the electrode film and contains a High-k material, and a second film that is provided between the first film and the tunnel insulating film and contains silicon nitride.
Public/Granted literature
- US20210296458A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2021-09-23
Information query
IPC分类: