Invention Grant
- Patent Title: Packaging method for fan-out wafer-level packaging structure
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Application No.: US17469783Application Date: 2021-09-08
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Publication No.: US11862595B2Publication Date: 2024-01-02
- Inventor: Hailin Zhao
- Applicant: SJ Semiconductor(Jiangyin) Corporation
- Applicant Address: CN Jiangyin
- Assignee: SJ SEMICONDUCTOR(JIANGYIN) CORPORATION
- Current Assignee: SJ SEMICONDUCTOR(JIANGYIN) CORPORATION
- Current Assignee Address: CN Jiangyin
- Agency: Alston & Bird LLP
- Priority: CN 2010935518.X 2020.09.08
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/00 ; H01L21/683 ; H01L25/065

Abstract:
The present disclosure provides a packaging method for a fan-out wafer-level packaging structure, including: providing two or more semiconductor chips, and bonding the semiconductor chips to a bonding layer; packaging the semiconductor chips by a plastic packaging layer; removing the bonding layer, and forming a redistribution layer on the semiconductor chips, so as to achieve interconnection between the semiconductor chips, where the redistribution layer includes one or more redistribution sublayers stacked in sequence, and a method for forming each redistribution sublayer includes: forming a dielectric layer on the semiconductor chips; forming vias in the dielectric layer by photolithography; baking the dielectric layer having the vias formed therein, wherein the warpage of the dielectric layer around the vias is mitigated; curing the dielectric layer; and forming on the dielectric layer a patterned metal distribution layer corresponding to the vias; and forming metal bumps on the redistribution layer.
Public/Granted literature
- US20220077096A1 PACKAGING METHOD FOR FAN-OUT WAFER-LEVEL PACKAGING STRUCTURE Public/Granted day:2022-03-10
Information query
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