Invention Grant
- Patent Title: Sidewall spacer to reduce bond pad necking and/or redistribution layer necking
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Application No.: US17869850Application Date: 2022-07-21
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Publication No.: US11862592B2Publication Date: 2024-01-02
- Inventor: Alexander Kalnitsky , Kong-Beng Thei
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/31 ; H01L23/522 ; H01L23/528 ; H01L21/56 ; H01L21/768

Abstract:
In some embodiments, an integrated chip (IC) is provided. The IC includes a metallization structure disposed over a semiconductor substrate, where the metallization structure includes an interconnect structure disposed in an interlayer dielectric (ILD) structure. A passivation layer is disposed over the metallization structure, where an upper surface of the interconnect structure is at least partially disposed between opposite inner sidewalls of the passivation layer. A sidewall spacer is disposed along the opposite inner sidewalls of the passivation layer, where the sidewall spacer has rounded sidewalls. A conductive structure is disposed on the passivation layer, the rounded sidewalls of the sidewall spacer, and the upper surface of the interconnect structure.
Public/Granted literature
- US20220359443A1 SIDEWALL SPACER TO REDUCE BOND PAD NECKING AND/OR REDISTRIBUTION LAYER NECKING Public/Granted day:2022-11-10
Information query
IPC分类: