Invention Grant
- Patent Title: Contact structures for three-dimensional memory
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Application No.: US16875180Application Date: 2020-05-15
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Publication No.: US11862565B2Publication Date: 2024-01-02
- Inventor: Zhongwang Sun , Zhong Zhang , Wenxi Zhou , Lei Liu , Zhiliang Xia
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/321 ; H01L21/768 ; H10B41/27 ; H10B41/35 ; H10B43/27 ; H10B43/35

Abstract:
Embodiments of 3D memory structures and methods for forming the same are disclosed. The fabrication method includes disposing an alternating dielectric stack on a substrate, wherein the alternating dielectric stack having first and second dielectric layers alternatingly stacked on top of each other. Next, a plurality of contact openings can be formed in the alternating dielectric stack such that a dielectric layer pair can be exposed inside at least one of the plurality of contact openings. The method further includes forming a film stack of alternating conductive and dielectric layers by replacing the second dielectric layer with a conductive layer, and forming a contact structure to contact the conductive layer in the film stack of alternating conductive and dielectric layers.
Public/Granted literature
- US20210287991A1 CONTACT STRUCTURES FOR THREE-DIMENSIONAL MEMORY Public/Granted day:2021-09-16
Information query
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