Invention Grant
- Patent Title: Probe unit with a free length cantilever contactor and pedestal
-
Application No.: US17730579Application Date: 2022-04-27
-
Publication No.: US11860190B2Publication Date: 2024-01-02
- Inventor: Satoshi Narita , Shou Harako , Jukiya Fukushi
- Applicant: KABUSHIKI KAISHA NIHON MICRONICS
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee Address: JP Tokyo
- Agency: BACON&THOMAS,PLLC
- Priority: JP 21093155 2021.06.02
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R1/073

Abstract:
It is possible to make the free length of a contactor uniform even when the contactor is joined to a position that deviates from a joint position in a high-frequency conducting path and make contact with an electrode with stability, which improves measurement quality. A probe unit according to the present disclosure includes: a coaxial connector that is attached to a main body and gives and receives an electrical signal to and from a tester via a coaxial cable; a high-frequency conducting path that is connected to the coaxial connector and transmits an electrical signal; a plurality of contactors, each having a tip portion that makes electrical contact with an electrode of an object to be inspected and giving and receiving an electrical signal to and from the high-frequency conducting path; and a pedestal that is interposed between the contactor and the high-frequency conducting path, and the pedestal is provided in each contactor such that a free length of the contactor is a predetermined length.
Public/Granted literature
- US20220390489A1 PROBE UNIT Public/Granted day:2022-12-08
Information query