- Patent Title: Image reconstruction method for X-ray measuring device, structure manufacturing method, image reconstruction program for X-ray measuring device, and X-ray measuring device
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Application No.: US16879389Application Date: 2020-05-20
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Publication No.: US11860111B2Publication Date: 2024-01-02
- Inventor: Atsushi Yamada
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: FINNEGAN, HENDERSON FARABOW, GARRETT & DUNNER, LLP
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/044

Abstract:
An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
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