Invention Grant
- Patent Title: Apparatus and method for recirculating fluids
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Application No.: US16723547Application Date: 2019-12-20
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Publication No.: US11858091B2Publication Date: 2024-01-02
- Inventor: Robert Eiseler , Koh Murai , Michael Perkins, II
- Applicant: Mega Fluid Systems, Inc.
- Applicant Address: US OR Tualatin
- Assignee: Mega Fluid Systems, Inc.
- Current Assignee: Mega Fluid Systems, Inc.
- Current Assignee Address: US OR Tualatin
- Agency: Lando & Anastasi, LLP
- Main IPC: B24B57/00
- IPC: B24B57/00 ; B24B57/02 ; B01F23/50 ; B01F25/51 ; B01F35/21 ; B01F25/00 ; B01F101/58
Abstract:
An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
Public/Granted literature
- US20200171622A1 APPARATUS AND METHOD FOR RECIRCULATING FLUIDS Public/Granted day:2020-06-04
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