Invention Grant
- Patent Title: Embedded ferroelectric memory in high-k first technology
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Application No.: US17230191Application Date: 2021-04-14
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Publication No.: US11751400B2Publication Date: 2023-09-05
- Inventor: Wei Cheng Wu , Pai Chi Chou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H10B51/30 ; H01L29/78 ; H01L29/51 ; H01L29/66 ; H01L29/06 ; H01L29/423

Abstract:
In some embodiments, the present disclosure relates to an integrated circuit. The integrated circuit has a first doped region and a second doped region within a substrate. A ferroelectric material is arranged over the substrate and laterally between the first doped region and the second doped region. A conductive electrode is over the ferroelectric material and between sidewalls of the ferroelectric material. One or more sidewall spacers are arranged along opposing sides of the ferroelectric material. A dielectric layer continuously and laterally extends from directly below the one or more sidewall spacers to directly below the ferroelectric material.
Public/Granted literature
- US20210233919A1 EMBEDDED FERROELECTRIC MEMORY IN HIGH-K FIRST TECHNOLOGY Public/Granted day:2021-07-29
Information query
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