- Patent Title: Three-dimensional memory devices and fabricating methods thereof
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Application No.: US17005612Application Date: 2020-08-28
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Publication No.: US11751385B2Publication Date: 2023-09-05
- Inventor: Jiaqian Xue , Tingting Gao , Lei Xue , Wanbo Geng , Xiaoxin Liu , Bo Huang
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H10B41/27 ; H10B41/35 ; H10B43/27 ; H10B43/35

Abstract:
A method for forming a 3D memory device is provided. The method comprises forming a sacrificial layer on a substrate, forming an alternating dielectric stack on the sacrificial layer, forming a plurality of channel holes vertically penetrating the alternating dielectric stack and the sacrificial layer, and forming a first channel layer in each channel hole. The method further comprises forming a second channel layer on the first channel layer in each channel hole, such that a merging point of the second channel layer is higher than a bottom surface of the alternating dielectric stack. The method further comprises removing the sacrificial layer to form a horizontal trench, and forming a selective epitaxial growth layer in the horizontal trench.
Public/Granted literature
- US20210296336A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATING METHODS THEREOF Public/Granted day:2021-09-23
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