Invention Grant
- Patent Title: Electrode-defined unsuspended acoustic resonator
-
Application No.: US17661668Application Date: 2022-05-02
-
Publication No.: US11750169B2Publication Date: 2023-09-05
- Inventor: Wen-Qing Xu , Di Lan , Christopher S. Koeppen
- Applicant: II-VI Delaware, Inc.
- Applicant Address: US DE Wilmington
- Assignee: II-VI DELAWARE, INC.
- Current Assignee: II-VI DELAWARE, INC.
- Current Assignee Address: US DE Wilmington
- Agency: Blank Rome LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13

Abstract:
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. The piezoelectric layer is a single crystal of LiNbO3 cut at an angle of 130°±30°. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
Public/Granted literature
- US20220263489A1 ELECTRODE-DEFINED UNSUSPENDED ACOUSTIC RESONATOR Public/Granted day:2022-08-18
Information query