- Patent Title: Hybrid bonding interconnection using laser and thermal compression
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Application No.: US16908928Application Date: 2020-06-23
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Publication No.: US11749637B2Publication Date: 2023-09-05
- Inventor: Min Ho Kim , Seok Ho Na , Dong Hyeon Park , Choong Hoe Kim , Woo Kyung Ju , Yun Seok Song , Dong Su Ryu
- Applicant: Amkor Technology Singapore Holding Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee: Amkor Technology Singapore Holding Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Spectrum IP Law Group LLC
- Main IPC: B23K26/50
- IPC: B23K26/50 ; H01L23/00 ; B23K101/40

Abstract:
In one example, a method to manufacture a semiconductor device comprises providing an electronic component over a substrate, wherein an interconnect of the electronic component contacts a conductive structure of the substrate, providing the substrate over a laser assisted bonding (LAB) tool, wherein the LAB tool comprises a stage block with a window, and heating the interconnect with a laser beam through the window until the interconnect is bonded with the conductive structure. Other examples and related methods are also disclosed herein.
Public/Granted literature
- US20210398940A1 HYBRID BONDING INTERCONNECTION USING LASER AND THERMAL COMPRESSION Public/Granted day:2021-12-23
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