Invention Grant
- Patent Title: Topological semi-metal interconnects
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Application No.: US16950453Application Date: 2020-11-17
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Publication No.: US11749602B2Publication Date: 2023-09-05
- Inventor: Ching-Tzu Chen , Nicholas Anthony Lanzillo , Vijay Narayanan , Takeshi Nogami
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Robert J. Shatto
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522 ; H01L21/3213 ; H01L21/768 ; H01L23/528

Abstract:
Provided is a method for fabricating an interconnect. The method comprises forming a topological semi-metal layer. The method further comprises patterning the topological semi-metal layer to form one or more interconnects. The method further comprises forming a dielectric layer between the one or more interconnects. The method further comprises forming a hermetic dielectric cap layer on top of the one or more interconnects and the dielectric layer.
Public/Granted literature
- US20220157733A1 TOPOLOGICAL SEMI-METAL INTERCONNECTS Public/Granted day:2022-05-19
Information query
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