Invention Grant
- Patent Title: Apparatus, system, and method for non-contact temperature monitoring of substrate supports
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Application No.: US16939629Application Date: 2020-07-27
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Publication No.: US11749542B2Publication Date: 2023-09-05
- Inventor: Bhaskar Prasad , Kirankumar Neelasandra Savandaiah , Thomas Brezoczky , Srinivasa Rao Yedla
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; H01L21/683

Abstract:
Embodiments of the present disclosure relate to apparatus, systems and methods for substrate processing. A detachable substrate support is disposed within a processing volume of a processing chamber and the substrate support includes a substrate interfacing surface and a back surface. The pedestal hub has a supporting surface removably coupled to the substrate support. A hub volume of the pedestal hub includes temperature measuring assembly disposed therein positioned to receive electromagnetic energy emitted from the back surface of the substrate support. The temperature measuring assembly measures an intensity of the electromagnetic energy entering the assembly and generates intensity signals. An apparent temperature of the substrate is determined based on the intensity signals.
Public/Granted literature
- US20220028712A1 APPARATUS, SYSTEM, AND METHOD FOR NON-CONTACT TEMPERATURE MONITORING OF SUBSTRATE SUPPORTS Public/Granted day:2022-01-27
Information query
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