Invention Grant
- Patent Title: Dual actuating tilting slit valve
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Application No.: US16999248Application Date: 2020-08-21
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Publication No.: US11749540B2Publication Date: 2023-09-05
- Inventor: Nir Merry , Jeff Hudgens
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; F16K31/524 ; F16K11/052

Abstract:
Disclosed is a wafer processing system, a dual gate system, and methods for operating these systems. The dual gate system may have a shaft, a first gate and a second gate coupled to the shaft at opposite sides thereof, and an actuator coupled to the shaft. The actuator is configured to tilt together the shaft, the first gate, and the second gate to a first sealed gate position or to a second sealed gate position. The actuator can be operated using a pneumatic mechanism, an electro-magnetic mechanism, or a cam follower mechanism.
Public/Granted literature
- US20220059373A1 DUAL ACTUATING TILTING SLIT VALVE Public/Granted day:2022-02-24
Information query
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