Invention Grant
- Patent Title: Vacuum pump having a liquid cooled vibration monitoring device mounted thereon
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Application No.: US17409880Application Date: 2021-08-24
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Publication No.: US11746788B2Publication Date: 2023-09-05
- Inventor: Shuichi Iguchi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP 20141531 2020.08.25 JP 21099986 2021.06.16
- Main IPC: F04C29/04
- IPC: F04C29/04 ; F04C28/28 ; F04C18/16
Abstract:
A vacuum pump includes a pump rotor, a housing configured to house the pump rotor, and a monitoring device attached to the housing and configured to detect vibration of the housing. The housing includes first channels for causing a coolant to flow to a portion opposed to the monitoring device.
Public/Granted literature
- US20220065253A1 DEVICE Public/Granted day:2022-03-03
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