Invention Grant
- Patent Title: Substrates including useful layers
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Application No.: US17190004Application Date: 2021-03-02
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Publication No.: US11670540B2Publication Date: 2023-06-06
- Inventor: Didier Landru , Nadia Ben Mohamed , Oleg Kononchuk , Frédéric Mazen , Damien Massy , Shay Reboh , François Rieutord
- Applicant: Soitec , COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Applicant Address: FR Bernin
- Assignee: Soitec,Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee: Soitec,Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- Current Assignee Address: FR Bernin; FR Paris
- Agency: TraskBritt
- Priority: FR 57722 2016.08.11
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/324 ; H01L21/263

Abstract:
Substrates may include a useful layer affixed to a support substrate. A surface of the useful layer located on a side of the useful layer opposite the support substrate may include a first region and a second region. The first region may have a first surface roughness, may be located proximate to a geometric center of the surface, and may occupy a majority of an area of the surface. The second region may have a second, higher surface roughness, may be located proximate to a periphery of the surface, and may occupy a minority of the area of the surface.
Public/Granted literature
- US20210202302A1 SUBSTRATES INCLUDING USEFUL LAYERS Public/Granted day:2021-07-01
Information query
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