Invention Grant
- Patent Title: Method of manufacturing semiconductor package having connection structure with tapering connection via layers
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Application No.: US17368486Application Date: 2021-07-06
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Publication No.: US11670518B2Publication Date: 2023-06-06
- Inventor: Han Na Jin
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR 20180117697 2018.10.02
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L21/56 ; H01L21/683 ; H01L23/538 ; H01L23/00 ; H01L23/31 ; H01L23/498 ; H01L25/065 ; H01L25/18

Abstract:
A semiconductor package includes: a connection structure having first and second surface opposing each other and including a plurality of insulating layers, a plurality of redistribution layers, and a plurality of connection vias; at least one semiconductor chip on the first surface having connection pads electrically connected to the plurality of redistribution layers; an encapsulant on the first surface encapsulating the at least one semiconductor chip; and UBM layers including UBM pads on the second surface and UBM vias connecting a redistribution layer. At least one connection via adjacent to the first surface has a tapered structure narrowed toward the second surface, and the other connection vias and the UBM vias have a tapered structure narrowed toward the first surface.
Public/Granted literature
- US20210335717A1 SEMICONDUCTOR PACKAGE HAVING A CONNECTION STRUCTURE WITH TAPERING CONNECTION VIA LAYERS Public/Granted day:2021-10-28
Information query
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