Invention Grant
- Patent Title: Fast arc detecting match network
-
Application No.: US17145228Application Date: 2021-01-08
-
Publication No.: US11670488B2Publication Date: 2023-06-06
- Inventor: Stephen E. Savas , Alexandre De Chambrier
- Applicant: COMET TECHNOLOGIES USA, INC.
- Applicant Address: US CA San Jose
- Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee Address: US CA San Jose
- Agency: Nolte Lackenbach Siegel
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A method of detecting plasma asymmetry in a radio frequency plasma processing system, the method including providing a radio frequency power to a reaction chamber having an approximate chamber symmetry axis and receiving from a plurality of broadband electromagnetic sensors a radio frequency signal. The method also including processing the radio frequency signals using Fourier analysis and determining based on the Fourier analysis of the radio frequency signals that a plasma asymmetry has occurred within the reaction chamber.
Public/Granted literature
- US20210217590A1 FAST ARC DETECTING MATCH NETWORK Public/Granted day:2021-07-15
Information query