Invention Grant
- Patent Title: Alignment device and optical device
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Application No.: US17246875Application Date: 2021-05-03
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Publication No.: US11668892B2Publication Date: 2023-06-06
- Inventor: Yuto Hattori , Nobuhiko Kanzaki
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP 2020103538 2020.06.16
- Main IPC: G02B7/00
- IPC: G02B7/00

Abstract:
To improve alignment accuracy of an optical element. An alignment device includes an optical element, a base portion that holds the optical element and is supported in a state movable in an X-direction and a Y-direction intersecting with the X-direction, a mechanical driving unit driven by a pressure of a fluid, a member in contact with the base portion pushed by the mechanical driving unit, a stage portion that holds the member and is supported in a state movable in the Y-direction, the mechanical driving unit driven by a pressure of a fluid, and a member in contact with the stage portion pushed by the mechanical driving unit. The optical element has a position: adjusted by a balance between the pushing force by the mechanical driving unit and an elastomeric force in which at least one of the base portion and the member elastically deforms in the X-direction; and adjusted by a balance between the pushing force by the mechanical driving unit and an elastomeric force in which at least one of the stage portion and the member elastically deforms in the Y-direction.
Public/Granted literature
- US20210389543A1 Alignment Device and Optical Device Public/Granted day:2021-12-16
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |