Invention Grant
- Patent Title: Apparatus based on a nanowire cross for measuring small potentials of a sample, method for producing the apparatus, and use of the apparatus
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Application No.: US16324157Application Date: 2017-09-06
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Publication No.: US11668672B2Publication Date: 2023-06-06
- Inventor: Svetlana Vitusevich , Ihor Zadorozhnyi
- Applicant: FORSCHUNGSZENTRUM JUELICH GMBH
- Applicant Address: DE Juelich
- Assignee: FORSCHUNGSZENTRUM JUELICH GMBH
- Current Assignee: FORSCHUNGSZENTRUM JUELICH GMBH
- Current Assignee Address: DE Juelich
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE 2016010764.2 2016.09.08
- International Application: PCT/DE2017/000286 2017.09.06
- International Announcement: WO2018/046034A 2018.03.15
- Date entered country: 2019-02-08
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L29/06 ; H01L29/786 ; H01L29/00

Abstract:
An apparatus for measuring electrical potentials of a liquid sample includes at least one field effect transistor having a source, a drain, and a gate, a substrate, and at least two intersecting nanowires of semiconductive material arranged on the substrate, each having a source and drain contact as a field effect transistor and a voltage applicator configured to apply a voltage between the respective source and drain contact. The cross section of the two nanowires has a shape of a triangle or a trapezium. A voltage applicator configured to apply a voltage to the substrate are arranged on the substrate. The nanowires are electrically insulated at least against the sample by a dielectric layer along their surface having a layer thickness between 5 and 40 nm, and at least one impurity is arranged in the dielectric layer as a bearing point which is capable of capturing charge carriers.
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