Invention Grant
- Patent Title: Method of manufacturing display apparatus
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Application No.: US17129139Application Date: 2020-12-21
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Publication No.: US11647664B2Publication Date: 2023-05-09
- Inventor: Daehum Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR 20200042404 2020.04.07
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L21/67 ; H01L21/687 ; C23C16/04 ; C23C16/458 ; H01L21/78 ; H01L27/12 ; H01L27/32 ; H01L51/00
Abstract:
A method of manufacturing a display apparatus includes placing a display substrate on a susceptor in a chamber, maintaining the susceptor at a first temperature, dividing the display substrate into a plurality of partial substrates, and maintaining the susceptor at a second temperature.
Public/Granted literature
- US20210313547A1 METHOD OF MANUFACTURING DISPLAY APPARATUS Public/Granted day:2021-10-07
Information query
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