Invention Grant
- Patent Title: Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
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Application No.: US17865092Application Date: 2022-07-14
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Publication No.: US11646710B2Publication Date: 2023-05-09
- Inventor: Dae Ho Kim , Mary Winters , Ramakrishna Vetury , Jeffrey B. Shealy
- Applicant: Akoustis, Inc.
- Applicant Address: US NC Huntersville
- Assignee: Akoustis, Inc.
- Current Assignee: Akoustis, Inc.
- Current Assignee Address: US NC Huntersville
- Agency: Ogawa P.C.
- Agent Richard T. Ogawa
- Main IPC: H03H3/02
- IPC: H03H3/02 ; H03H9/10 ; H03H9/13 ; H03H9/17 ; H03H9/54 ; H03H9/02 ; H03H9/05
Abstract:
A bulk acoustic wave (BAW) resonator includes a solidly mounted reflector, for example, a Bragg-type reflector, a piezoelectric layer, and first and second electrodes on first and second surfaces, respectively, of the piezoelectric layer. A filter device or filter system includes at least one BAW resonator. Related methods of fabrication include forming the BAW resonator.
Public/Granted literature
- US20220352863A1 PIEZOELECTRIC ACOUSTIC RESONATOR MANUFACTURED WITH PIEZOELECTRIC THIN FILM TRANSFER PROCESS Public/Granted day:2022-11-03
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