Invention Grant
- Patent Title: Chip package structure including a silicon substrate interposer and methods for forming the same
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Application No.: US17205621Application Date: 2021-03-18
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Publication No.: US11646255B2Publication Date: 2023-05-09
- Inventor: Kuo Lung Pan , Yu-Chia Lai , Tin-Hao Kuo , Hao-Yi Tsai , Chung-Shi Liu , Chen-Hua Yu , Po-Yuan Teng , Teng-Yuan Lo , Mao-Yen Chang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/498 ; H01L21/48 ; H01L23/31 ; H01L23/00 ; H01L25/16 ; H01L25/00

Abstract:
A chip package structure includes an interposer structure that contains a package-side redistribution structure, an interposer core assembly, and a die-side redistribution structure. The interposer core assembly includes at least one silicon substrate interposer, and each of the at least one silicon substrate interposer includes a respective silicon substrate, a respective set of through-silicon via (TSV) structures vertically extending through the respective silicon substrate, a respective set of interconnect-level dielectric layers embedding a respective set of metal interconnect structures, and a respective set of metal bonding structures that are electrically connected to the die-side redistribution structure. The chip package structure includes at least two semiconductor dies that are attached to the die-side redistribution structure, and an epoxy molding compound (EMC) multi-die frame that laterally encloses the at least two semiconductor dies.
Public/Granted literature
- US20220302003A1 CHIP PACKAGE STRUCTURE INCLUDING A SILICON SUBSTRATE INTERPOSER AND METHODS FOR FORMING THE SAME Public/Granted day:2022-09-22
Information query
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