Invention Grant
- Patent Title: Dual crystal orientation for semiconductor devices
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Application No.: US17174942Application Date: 2021-02-12
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Publication No.: US11646238B2Publication Date: 2023-05-09
- Inventor: Kuo-Cheng Chiang , Chih-Hao Wang , Ching-Wei Tsai , Kuan-Lun Cheng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/84 ; H01L21/8234 ; H01L27/12 ; H01L27/088 ; H01L27/06

Abstract:
The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor device with fin structures having different top surface crystal orientations and/or different materials. The present disclosure provides a semiconductor structure including n-type FinFET devices and p-type FinFET devices with different top surface crystal orientations and with fin structures having different materials. The present disclosure provides a method to fabricate a semiconductor structure including n-type FinFET devices and p-type FinFET devices with different top surface crystal orientations and different materials to achieve optimized electron transport and hole transport. The present disclosure also provides a diode structure and a bipolar junction transistor structure that includes SiGe in the fin structures.
Public/Granted literature
- US20210193535A1 DUAL CRYSTAL ORIENTATION FOR SEMICONDUCTOR DEVICES Public/Granted day:2021-06-24
Information query
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