Invention Grant
- Patent Title: Apparatus and method for analyzing evolved gas
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Application No.: US16041683Application Date: 2018-07-20
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Publication No.: US11646188B2Publication Date: 2023-05-09
- Inventor: Ryusuke Hirose , Hideyuki Akiyama , Noriaki Sakai , Masafumi Watanabe
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holland & Hart LLP
- Priority: JP 2017142233 2017.07.21
- Main IPC: H01J49/04
- IPC: H01J49/04 ; H01J49/00 ; G01N33/00 ; G01N33/44

Abstract:
Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.
Public/Granted literature
- US20190027353A1 APPARATUS AND METHOD FOR ANALYZING EVOLVED GAS Public/Granted day:2019-01-24
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