Light deflector and its manufacturing method, image projector, object recognition device, laser headlamp device, optical writing device, and mobile object
Abstract:
A light deflector, a method of manufacturing the light deflector, and an image projector. The light deflector and the method includes forming a first wafer provided with a plurality of movable mirror units, bonding the first wafer to be sandwiched between a second wafer on which a plurality of base units are formed and a third wafer on which a plurality of spacers are formed, bonding a fourth wafer on which a plurality of transparent members are formed on the third wafer, bonding a plurality of polyhedron light-beam adjusters on the fourth wafer such that one of the plurality of polyhedron light-beam adjusters and the movable mirror unit become a pair, and cutting a wafer layered product of the first to fourth wafers for each area in which the light deflector is formed. The image projector includes the light deflector, and an image is projected by optical scanning.
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