- Patent Title: Flow rate sensor correction device, flow rate sensor, flow rate control device, program recording medium on which is recorded a program for a correction device, and correction method
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Application No.: US16915534Application Date: 2020-06-29
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Publication No.: US11644354B2Publication Date: 2023-05-09
- Inventor: Hiroyuki Okano
- Applicant: HORIBA STEC, Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Alleman Hall Creasman & Tuttle LLP
- Priority: JP 2019124029 2019.07.02
- Main IPC: G01F1/696
- IPC: G01F1/696 ; G01F1/69

Abstract:
In order to provide a correction device that enables the accuracy of the linearity between sensor output values and flow rate values in a flow rate sensor, there are provided a sensitivity correction function storage unit that stores a sensitivity correction function in which at least a portion of sensitivity correction values are set to different values in accordance with the sensor output values output from a flow rate sensor in an initial state in which the sensitivity coefficient is set to an initial value, a sensitivity setting unit that sets the sensitivity coefficient based on the initial values and on the sensitivity correction function, and then adjusts the sensitivity of the flow rate sensor, and a coefficient calculation unit that calculates a post-correction flow rate characteristic function based on function correction values that are decided in accordance with the flow rate values output post sensitivity correction.
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