Invention Grant
- Patent Title: Optical position measuring device
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Application No.: US17164867Application Date: 2021-02-02
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Publication No.: US11644348B2Publication Date: 2023-05-09
- Inventor: Thomas Kaelberer , Wolfgang Holzapfel
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Trauntreut
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: DE 2020202080.9 2020.02.19
- Main IPC: G01D5/38
- IPC: G01D5/38 ; G01B11/00 ; G01D5/347

Abstract:
An optical position measuring device for recording a relative position of two scales includes the scales. The longitudinal extents of the scales are oriented parallel to a first and second measuring direction. A horizontal plane of movement is spanned by these measuring directions. A light source is configured to emit an illumination beam that is split into at least two sub-beam bundles at the first scale. The sub-beam bundles subsequently impinge on the second scale, which is tilted about the direction of the longitudinal extent thereof relative to the horizontal plane of movement, and are back-reflected to impinge again on the first scale and are recombined there such that a resulting signal beam is subsequently propagated toward a detection unit, via which phase-shifted scanning signals are generatable with respect to a relative movement of the scales along a third perpendicular measuring direction and the first or second measuring direction.
Public/Granted literature
- US20210255008A1 OPTICAL POSITION MEASURING DEVICE Public/Granted day:2021-08-19
Information query
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