Invention Grant
- Patent Title: Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope
-
Application No.: US16644389Application Date: 2017-09-07
-
Publication No.: US11644313B2Publication Date: 2023-05-09
- Inventor: Haoran Wen , Farrokh Ayazi
- Applicant: Georgia Tech Research Corporation
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Myers Bigel, P.A.
- International Application: PCT/US2017/050442 2017.09.07
- International Announcement: WO2019/050517A 2019.03.14
- Date entered country: 2020-03-04
- Main IPC: G01C19/5684
- IPC: G01C19/5684 ; B81B7/02 ; G01C19/5698
Abstract:
A microelectromechanical resonator includes a resonator member suspended over a surface of a substrate by at least one anchor that is connected to the substrate. The resonator member includes outer and inner frames that are concentrically arranged and mechanically coupled by support structures extending therebetween. Related apparatus and gyroscopes are also discussed.
Public/Granted literature
- US20210063157A1 SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE Public/Granted day:2021-03-04
Information query
IPC分类:
