Invention Grant
- Patent Title: ta-C based coatings with improved hardness
-
Application No.: US17291378Application Date: 2019-11-07
-
Publication No.: US11643733B2Publication Date: 2023-05-09
- Inventor: Xu Shi , Zhi Tang
- Applicant: Nanofilm Technologies International Limited
- Applicant Address: SG Singapore
- Assignee: NANOFILM TECHNOLOGIES INTERNATIONAL LIMITED
- Current Assignee: NANOFILM TECHNOLOGIES INTERNATIONAL LIMITED
- Current Assignee Address: SG Singapore
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP 205134 2018.11.08
- International Application: PCT/EP2019/080615 2019.11.07
- International Announcement: WO2020/094816A 2020.05.14
- Date entered country: 2021-05-05
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C28/04 ; C23C14/02 ; C23C14/32 ; C23C14/34 ; C23C28/00

Abstract:
A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.
Public/Granted literature
- US20220033975A1 TA-C BASED COATINGS WITH IMPROVED HARDNESS Public/Granted day:2022-02-03
Information query
IPC分类: